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Process modules accept wafers at locations that may vary substantially from one module to another
basis to achieve the goals of the CIM Framework specifications
Tube defined in this method has a circular cross section and is made of PFA
1 This Document covers requirements for tungsten hexafluoride used in the semiconductor industry
S02100 - SEMI S21 - 作業者保護のための安全ガイドライン Revision:SEMI S21-1106E (Reapproved 0612) - Superseded Process modules accept wafers atglobal Environmental Health & Safety Technical Committee2012221global Audits and Reviews Subcommittee20126www. semiviews. org www. semi. org20031020072 FPD FPD FPD 1 2 3 4 5 6 7 8 9 10 11 Referenced SEMI Standards SEMI F34 Guide for Liquid Chemical Pipe Labeling SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment SEMI S8 Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment SEMI