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SEMI M58 — Test Method for Evaluating DMA-Based Particle Deposition Systems and Processes
• Power supply and connector
Within-laboratory precision has been determined through a multilaboratory experiment on substrates having resistivities from 0
Welded connections tested by this method are made by PFA weld fitting
E09700 - SEMI E97 - Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces StdPbc-0318 SEMI M58 — Test MethodThis standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published February 2000. This document defines the global declarations used by all other components of the CIM Framework and also specifies the common architecture patterns that serve to