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This Document provides a suggested maximum impurity level for silane (SiH4) that is used in the photovoltaic industry
Flat Panel Display Global Technical Committeeで技術的に承認されたもので，Japanese FPD Materials and Components Committeeが直接責任を負うものである。現版は，2003年4月28日Japanese Regional Standards Committeeにて承認されている。2003年6月にまずwww
orgで，そして2008年3月にCD-ROMで入手可能となる。初版は2001年発行，前版は2002年に発行された。
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MS01500 - SEMI MS15 - Guide to MEMS Manufacturing Readiness Levels Revision:SEMI MS15-0325 - Current This Document provides a suggested1 Purpose 1. 1 This Guide provides best practices for the development and productization of microelectromechanical systems (MEMS). The goal is to have common documented readiness level definitions, processes and practices to facilitate the creation of MEMS products that meet targeted specification, performance, quality, cost, time to market, and other relevant product requirements. 2 Scope 2. 1 This Guide aims to help companies assess and progress
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