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If specific inlet challenge(s) and/or inlet measurements are required
2-0417 — Specification for 125 mm (5 inch) Port for Standard Mechanical Interface (SMIF)
such as pellets of perfluoroalkoxy (PFA)
SEMI E122-0217 (title change)
G02500 - SEMI G25 - Test Method for Measuring the Resistance of Package Leads Revision:SEMI G25-89 (Reapproved 0811) - Inactive If specific inlet challenge(s) and/orThis Standard was technically approved by the global Assembly & Packaging Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 1, 2011. Available at www. semiviews. org and www. semi. org in August 2011; originally published in 1984; previously published in 1989. This Document defines the equipment, materials, and procedure used to measure the resistance of leads in packaging elements.